High Reliability of MEMS Packaged Capacitive Pressure Sensor Employing 3C-SiC for High Temperature
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چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Energy Procedia
سال: 2015
ISSN: 1876-6102
DOI: 10.1016/j.egypro.2015.03.279